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As MEMS are manufactured using batch fabrication techniques similar to IC technology, MEMS are expected to deliver high functionality at low prices.
Current systems are limited by the capability of sensors and actuators, as these are bulkier and less reliable than the microelectronic circuit. In a MEM system the sensors act as the ?eyes' and gather data about the environment. The microelectronic circuit, which is the ?brain', processes the data and accordingly controls the mechanical systems, the ?arms' of the MEMS, to modify the environment suitably. The electronics on the MEMS are manufactured using IC techniques while micro machining techniques are used to produce the mechanical and electromechanical parts...
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