Design And Fabrication Of Microheaters For Localized Carbon Nanotube Growth
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Title: Design And Fabrication Of Microheaters For Localized Carbon Nanotube Growth

Essay Details:

Subject: Technology
Author: Gloria H
Date: August 11, 2011
Level: University
Grade: A
Length: 3 / 636

Essay text:

The SiO2 over microheaters can be etched for direct contact between Pt and SWNTs. The first microheater design (Fig. 1a) is an 87?87 ?m? micro-hotplate with a meander Pt resistor embedded, which has the potential as gas sensors. The second microheater (Fig. 1b) has a curved shape that is designed to study E-field distribution and E-field enhancement of carbon nanotube alignment. The third microheater is further simplified into one straight line (5 ?m wide and 120 ?m long) (Fig. 1c) for studying temperature and SWNT density distribution along the microheater line. This will provide useful information for further scaling down to a hot spot heater...

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